Silicon nitride membrane multi-frame arrays
Multi-frame arrays (MFAs) have been developed as an intermediate product between individual membrane windows and intact lithography wafers. MFAs consist of a 23.5 mm x 23.5 mm outer frame, which can contain any of the following sub-arrays: a 4 x 4 array of 5.0mm x 5.0 mm frames; a 3 x 3 array of 7.5 mm x 7.5 mm frames; a 2 x 2 array of 10.0 mm x 10.0 mm frames.
Each of the individual frames within the subarray will contain a centred standard silicon nitride membrane.
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