In a study by Murshidy et Al investigating the optical properties of a H1 nano-cavity consisting of a single missing airhole, silicon nitride membranes by Silson were used to help produce both linearly polarized optical modes as well as unpolarized optical modes.
The nano-cavities made using electron beam lithography and other techniques, and were fabricated into Silson’s free-standing 200nm thick silicon nitride membranes.