Apertures
Anisotropic etching of silicon nitride coated wafers and subsequent removal of the free-standing membrane is an excellent method of producing silicon apertures.
The rear of the apertures have sloping side walls, corresponding to the (111) planes of the silicon crystal lattice as described here.
Typical designs are shown in the table below although our apertures can be produced in any orthogonal shape subject to minimum order quantities. A number of popular designs are usually available from stock.
| Frame Size | 5.0 x 5.0 mm 7.5 x 7.5 mm 10.0 x 10.0 mm 17.5 x 17.5 mm |
| Frame Thickness | 100 µm 200 µm 381 µm 525 µm |
| Aperture Size (for example) | 0.1 x 0.1 mm 0.25 x 0.25 mm 0.5 x 0.5 mm 1.0 x 1.0 mm 2.0 x 2.0 mm 3.0 x 3.0 mm 4.0 x 4.0 mm 5.0 x 5.0 mm and so on … |