Integration of solid-state nanopore arrays via dry bonding to photostructured microfluidic networks

arXiv has published a paper by Jones and Mierzejewski on a “new concept for microfluidic integration of nanopore arrays in permanent epoxy-based microfluidics”.

Prior to microfluidic fabrication, Silson’s silicon nitride membranes in a 5.0 x 5.0 mm square frame were used for the nanopore milling: they were first coated with AuPd for conductivity and then nanopores were produced by focused-ion-beam (FIB) milling.

Click here to read the full paper!

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